ICPT 2016 is hosted by CMP User's Group-China (CMPUG-CN). This conference will enhance the collaboration between industry and academia, manufacturers and clients, in response to the trend of rapid development of semiconductor industry. ICPT 2016 encourages the communication and exchange of ideas and opportunities.
We look forward to seeing you at ICPT 2016 and show you around the beautiful Friendship Hotel in Beijing city, China.
CMP (chemical mechanical planarization), as one of the most important processes in the semiconductor manufacturing, has been developed and improved continuously year after year. It has built a certain position in related industries, and is expanding in its applied area. From the user's point of view, technical demand is becoming higher and higher, and additional applications beyond the semiconductor area are increasing.
ICPT (International Conference on Planarization/CMP Technology), is a magnificent opportunity to have discussions on CMP technologies, including FEOL and BEOL CMP, Fundamentals of CMP, Polishing Processes, Consumables, Equipment, 3D/TSV, Metrology, Cleaning, Defect Control, Process Control, etc. The conference provides a place where every relevant researcher and engineer can get together to discuss openly and exchange information widely.
CMP User's Group-China (CMPUG-CN)
IEEE Beijing Section
China Semiconductor Industry Association (CSIA)
Chinese Tribology Institute of the Chinese Mechanical Engineering Society (CTI-CMES)
The Integrated Circuit Materials Industry Technology Innovative Alliance (ICMTIA)
In cooperation with:
Korea CMP User Group (KCMPUG)
Northern California Chapter AVS (NCCAVS) CMPUG
Europe CMP User Group (ECMPUG)
Chemical Mechanical Planarization User Group Taiwan (CMPUGTW)
The Planarization and CMP Technical Committee Japan (the Planarization CMP Committee)
Xinchun Lu, Tsinghua University
Xinping Qu, Fudan University
Yuchun Wang, Anji Microelectronics
Ying Shi, ICMTIA
Introduction of Beijing
Beijing is the capital of the People's Republic of China and one of the most populous cities in the world.
Its total population in 2013 was 21,150,000. The city proper is the 10th most populous in the world. The metropolis, located in northern China, is governed as a direct-controlled municipality under the national government with 16 urban, suburban, and rural districts. Beijing Municipality is surrounded by Hebei Province with the exception of neighboring Tianjin Municipality to the southeast; together the three divisions form the Jingjinji metropolitan region and the national capital region of China.
Beijing is the second largest Chinese city by urban population after Shanghai and is the nation's political, cultural and educational center. It is home to the headquarters of most of China's largest state-owned companies, and is a major hub for the national highway, expressway, railway, and high-speed rail networks. The Beijing Capital International Airport is the second busiest in the world by passenger traffic.
Places of interest
At the historical heart of Beijing lies the Forbidden City, the enormous palace compound that was the home of the emperors of the Ming and Qing dynasties; the Forbidden City hosts the Palace Museum, which contains imperial collections of Chinese art. Surrounding the Forbidden City are several former imperial gardens, parks and scenic areas, notably Beihai, Shichahai, Zhongnanhai, Jingshan and Zhongshan. These places, particularly Beihai Park, are described as masterpieces of Chinese gardening art, and are popular tourist destinations with tremendous historical importance; in the modern era, Zhongnanhai has also been the political heart of various Chinese governments and regimes and is now the headquarters of the Communist Party of China and the State Council. From Tiananmen Square, right across from the Forbidden City, there are several notable sites, such as the Tiananmen, Qianmen, the Great Hall of the People, the National Museum of China, the Monument to the People's Heroes, and the Mausoleum of Mao Zedong. The Summer Palace and the Old Summer Palace both lie at the western part of the city; the former, a UNESCO World Heritage Site, contains a comprehensive collection of imperial gardens and palaces that served as the summer retreats for the Qing imperial family.
Among the best known religious sites in the city is the Temple of Heaven (Tiantan), located in southeastern Beijing, also a UNESCO World Heritage Site, where emperors of the Ming and Qing dynasties made visits for annual ceremonies of prayers to Heaven for good harvest. In the north of the city is the Temple of Earth (Ditan), while the Temple of the Sun (Ritan) and the Temple of the Moon (Yuetan) lie in the eastern and western urban areas respectively. Other well-known temple sites include the Dongyue Temple, Tanzhe Temple, Miaoying Temple, White Cloud Temple, Yonghe Temple, Fayuan Temple, Wanshou Temple and Big Bell Temple. The city also has its own Confucius Temple, and a Guozijian or Imperial Academy. The Cathedral of the Immaculate Conception, built in 1605, is the oldest Catholic church in Beijing. The Niujie Mosque is the oldest mosque in Beijing, with a history stretching back over a thousand years.
Beijing contains several well-preserved pagodas and stone pagodas, such as the towering Pagoda of Tianning Temple, which was built during the Liao Dynasty from 1100 to 1120, and the Pagoda of Cishou Temple, which was built in 1576 during the Ming Dynasty. Historically noteworthy stone bridges include the 12th-century Lugou Bridge, the 17th-century Baliqiao bridge, and the 18th-century Jade Belt Bridge. The Beijing Ancient Observatory displays pre-telescopic spheres dating back to the Ming and Qing dynasties. The Fragrant Hills (Xiangshan) is a popular scenic public park that consists of natural landscaped areas as well as traditional and cultural relics. The Beijing Botanical Garden exhibits over 6,000 species of plants, including a variety of trees, bushes and flowers, and an extensive peony garden. The Taoranting, Longtan, Chaoyang, Haidian, Milu Yuan and Zizhu Yuan parks are some of the notable recreational parks in the city. The Beijing Zoo is a center of zoological research that also contains rare animals from various continents, including the Chinese giant panda.
There are 144 museums and galleries (as of June 2008) in the city. In addition to the Palace Museum in the Forbidden City and the National Museum of China, other major museums include the National Art Museum of China, the Capital Museum, the Beijing Art Museum, the Military Museum of the Chinese People's Revolution, the Geological Museum of China, the Beijing Museum of Natural History and the Paleozoological Museum of China.
Located at the outskirts of urban Beijing, but within its municipality are the Thirteen Tombs of the Ming Dynasty, the lavish and elaborate burial sites of thirteen Ming emperors, which have been designated as part of the UNESCO World Heritage Site Imperial Tombs of the Ming and Qing Dynasties. The archaeological Peking Man site at Zhoukoudian is another World Heritage Site within the municipality, containing a wealth of discoveries, among them one of the first specimens of Homo erectus and an assemblage of bones of the gigantic hyena Pachycrocuta brevirostris. There are several sections of the UNESCO World Heritage Site Great Wall of China, most notably Badaling, Jinshanling, Simatai and Mutianyu.